| CX-200TM
SEM (Auto Stage) |
 |
| Feature |
- 최대 30배까지 배율조정가능 (유효배율 약 10만배)
- 강력한 터보펌프를 기본사양으로 채택
펌프의 소음이 없으며 시동후 3분이면 측정가능
- Auto stage로 보다 편리한 운용가능
- Automatic control기능 제공으로 쉽고 빠른 이미지 획득
[Filament Satiration, Auto Focus/Stingmation, Brightness/Contrast]
- 모듈방식의 조립으로 보다 쉽고 편한 유지보수
- 다양한 Detector 부착으로 더 많은 정보의 획득
[EDS, BSE, WDS 부착기능]
|
|
|
Resolution
|
3.0nm (at 30kV, SE Image)
10nm (at 3kV, SE Image) |
| Magnification |
x15 ~ x300,000 |
| Accelerating voltage |
0.5kV~30kV |
| Objective IRIS |
Variable aperture with
4 different diameters (30um,50um,100um,200um) |
| Image Shift |
±50um |
| Stage |
Manual Stage
X: 40mm, Y: 65mm, T: -20°~90°, R:360° |
| Sample Size |
Horizontal: 130mm, Vertical:
60mm |
| Automation Function |
Filament Saturation
Auto Focus
Auto Brightness
Auto Contrast |
| Display Mode |
Reduced window mode: 320
x 240 pixel
TV screen scan mode: 640 x 4800 pixel
Slow screen scan mode: 800 x 600 pixel (3steps)
Photo screen capture mode 1: 1280 x 960 pixel
Photo screen capture mode 2: 2560 x 1920 pixel
Photo screen capture mode 3: 5120 x 3840 pixel
Waveform observation mode |
| Vacuum system |
Turbo molecular pump (3분
이내 진공가능)
Rotary pump |
| Optional Detector |
EDS(Energy dispersive spectroscopy)
WDS(Wavelength dispersive spectroscopy)
BSE(Backscattered Electron)
EBSD( Electron Back Scattered Diffraction) |
| Dimension &
Weight |
Main system: 770(W)x880(D)x1500(H)mm,
350kg
Operation table: 850(W)x800(D)x700(H)mm, 10kg |
|
