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CX-200TA SEM(Auto Stage) CX-200TM SEM(Manual Stage) EM-30AX
EM-30 EM-20


CX-200TA SEM (Auto Stage)


Feature
  • ÃÖ´ë 30¹è±îÁö ¹èÀ²Á¶Á¤°¡´É (À¯È¿¹èÀ² ¾à 10¸¸¹è)
  • °­·ÂÇÑ Åͺ¸ÆßÇÁ¸¦ ±âº»»ç¾çÀ¸·Î äÅÃ
    ÆßÇÁÀÇ ¼ÒÀ½ÀÌ ¾øÀ¸¸ç ½Ãµ¿ÈÄ 3ºÐÀ̸é ÃøÁ¤°¡´É
  • Auto stage·Î º¸´Ù Æí¸®ÇÑ ¿î¿ë°¡´É
  • Automatic control±â´É Á¦°øÀ¸·Î ½±°í ºü¸¥ À̹ÌÁö ȹµæ
    [Filament Satiration, Auto Focus/Stingmation, Brightness/Contrast]
  • ¸ðµâ¹æ½ÄÀÇ Á¶¸³À¸·Î º¸´Ù ½±°í ÆíÇÑ À¯Áöº¸¼ö
  • ´Ù¾çÇÑ Detector ºÎÂøÀ¸·Î ´õ ¸¹Àº Á¤º¸ÀÇ È¹µæ
    [EDS, BSE, WDS ºÎÂø±â´É]






Specifications

Resolution

3.0nm (at 30kV, SE Image)
10nm (at 3kV, SE Image)
Magnification x15 ~ x300,000
Accelerating voltage 0.5kV~30kV
Electron gun Tungsten filament, Pre-centered cartridge filament
Objective IRIS Variable aperture with 4 different diameters (30um,50um,100um,200um)
Image Shift ¡¾50um
Stage Manual Stage
X: 40mm, Y: 65mm, T: -20¡Æ~90¡Æ, R:360¡Æ
Auto Stage
Z: 5~60mm
Sample Size Horizontal: 130mm, Vertical: 60mm
Automation Function Filament Saturation
Auto Focus
Auto Brightness
Auto Contrast
Display Mode Reduced window mode: 320 x 240 pixel
TV screen scan mode: 640 x 4800 pixel
Slow screen scan mode: 800 x 600 pixel (3steps)
Photo screen capture mode 1: 1280 x 960 pixel
Photo screen capture mode 2: 2560 x 1920 pixel
Photo screen capture mode 3: 5120 x 3840 pixel
Waveform observation mode
Vacuum system Turbo molecular pump (3ºÐ À̳» Áø°ø°¡´É)
Rotary pump
Optional Detector EDS(Energy dispersive spectroscopy)
WDS(Wavelength dispersive spectroscopy)
BSE(Backscattered Electron)
EBSD( Electron Back Scattered Diffraction)
Dimension & Weight Main system: 770(W)x880(D)x1500(H)mm, 350kg
Operation table: 850(W)x800(D)x700(H)mm, 10kg



 

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