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CX-200TA SEM(Auto Stage) CX-200TM SEM(Manual Stage) EM-30AX
EM-30 EM-20


CX-200TA SEM (Auto Stage)


Feature
  • 최대 30배까지 배율조정가능 (유효배율 약 10만배)
  • 강력한 터보펌프를 기본사양으로 채택
    펌프의 소음이 없으며 시동후 3분이면 측정가능
  • Auto stage로 보다 편리한 운용가능
  • Automatic control기능 제공으로 쉽고 빠른 이미지 획득
    [Filament Satiration, Auto Focus/Stingmation, Brightness/Contrast]
  • 모듈방식의 조립으로 보다 쉽고 편한 유지보수
  • 다양한 Detector 부착으로 더 많은 정보의 획득
    [EDS, BSE, WDS 부착기능]






Specifications

Resolution

3.0nm (at 30kV, SE Image)
10nm (at 3kV, SE Image)
Magnification x15 ~ x300,000
Accelerating voltage 0.5kV~30kV
Electron gun Tungsten filament, Pre-centered cartridge filament
Objective IRIS Variable aperture with 4 different diameters (30um,50um,100um,200um)
Image Shift ±50um
Stage Manual Stage
X: 40mm, Y: 65mm, T: -20°~90°, R:360°
Auto Stage
Z: 5~60mm
Sample Size Horizontal: 130mm, Vertical: 60mm
Automation Function Filament Saturation
Auto Focus
Auto Brightness
Auto Contrast
Display Mode Reduced window mode: 320 x 240 pixel
TV screen scan mode: 640 x 4800 pixel
Slow screen scan mode: 800 x 600 pixel (3steps)
Photo screen capture mode 1: 1280 x 960 pixel
Photo screen capture mode 2: 2560 x 1920 pixel
Photo screen capture mode 3: 5120 x 3840 pixel
Waveform observation mode
Vacuum system Turbo molecular pump (3분 이내 진공가능)
Rotary pump
Optional Detector EDS(Energy dispersive spectroscopy)
WDS(Wavelength dispersive spectroscopy)
BSE(Backscattered Electron)
EBSD( Electron Back Scattered Diffraction)
Dimension & Weight Main system: 770(W)x880(D)x1500(H)mm, 350kg
Operation table: 850(W)x800(D)x700(H)mm, 10kg



 

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