CX-200TA
SEM (Auto Stage) |
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Feature |
- ÃÖ´ë 30¹è±îÁö ¹èÀ²Á¶Á¤°¡´É (À¯È¿¹èÀ² ¾à 10¸¸¹è)
- °·ÂÇÑ Åͺ¸ÆßÇÁ¸¦ ±âº»»ç¾çÀ¸·Î äÅÃ
ÆßÇÁÀÇ ¼ÒÀ½ÀÌ ¾øÀ¸¸ç ½Ãµ¿ÈÄ 3ºÐÀ̸é ÃøÁ¤°¡´É
- Auto stage·Î º¸´Ù Æí¸®ÇÑ ¿î¿ë°¡´É
- Automatic control±â´É Á¦°øÀ¸·Î ½±°í ºü¸¥ À̹ÌÁö ȹµæ
[Filament Satiration, Auto Focus/Stingmation, Brightness/Contrast]
- ¸ðµâ¹æ½ÄÀÇ Á¶¸³À¸·Î º¸´Ù ½±°í ÆíÇÑ À¯Áöº¸¼ö
- ´Ù¾çÇÑ Detector ºÎÂøÀ¸·Î ´õ ¸¹Àº Á¤º¸ÀÇ È¹µæ
[EDS, BSE, WDS ºÎÂø±â´É]
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Resolution
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3.0nm (at 30kV, SE Image)
10nm (at 3kV, SE Image) |
Magnification |
x15 ~ x300,000 |
Accelerating voltage |
0.5kV~30kV |
Electron gun |
Tungsten filament, Pre-centered
cartridge filament |
Objective IRIS |
Variable aperture with
4 different diameters (30um,50um,100um,200um) |
Image Shift |
¡¾50um |
Stage |
Manual Stage
X: 40mm, Y: 65mm, T: -20¡Æ~90¡Æ, R:360¡Æ
Auto Stage
Z: 5~60mm |
Sample Size |
Horizontal: 130mm, Vertical:
60mm |
Automation Function |
Filament Saturation
Auto Focus
Auto Brightness
Auto Contrast |
Display Mode |
Reduced window mode: 320
x 240 pixel
TV screen scan mode: 640 x 4800 pixel
Slow screen scan mode: 800 x 600 pixel (3steps)
Photo screen capture mode 1: 1280 x 960 pixel
Photo screen capture mode 2: 2560 x 1920 pixel
Photo screen capture mode 3: 5120 x 3840 pixel
Waveform observation mode |
Vacuum system |
Turbo molecular pump (3ºÐ
À̳» Áø°ø°¡´É)
Rotary pump |
Optional Detector |
EDS(Energy dispersive spectroscopy)
WDS(Wavelength dispersive spectroscopy)
BSE(Backscattered Electron)
EBSD( Electron Back Scattered Diffraction) |
Dimension &
Weight |
Main system: 770(W)x880(D)x1500(H)mm,
350kg
Operation table: 850(W)x800(D)x700(H)mm, 10kg |
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