| i-NEXIV VMR3020(Versatile Part Measurement Platform) |
 |
| Feature |
- 대학, 기업연구소, 각급연구기관 등의 분석, 연구용
- MEMS,나노프린터,반도체,LCD,금속 부품 등
- Digital Imaging&Multi-sensing metrology 신개념 CNC Video 현미경
|
| Ultrahigh-Precision Measurement Paltform |
- X,Y,Z travel 300x200x150mm
- Sub-micrometer level uncertainty(U1xy 0.6㎛
+2L/1000㎛,U2xy 0.9㎛+3L/1000㎛
Type 1,2,3 Models
- 3 models(type:1,2,3)with 5-step zoom
magnification to cover different fields of view(F.O.V)
and resolution erquments
- Long working distance(50mm) permits measurement of
parts with large height variances, support 3D
measurement
- Programmalbe dual white LED illuminator rings
- 15x zoom provides wide field of view for rapid search and high magnification for precise measurement
- User-fiendly and versatile VMR Automeasure software
includes :
| |
 |
| TTL(Thru-The-Lens)Laser AF |
- High Speed&Accurate Focusing enabling precise-Z
axis measurements
- Co-Axial Laser Unit for easy operation
- 50mm Working Distance for Dynamic Height
Measurement
- Trigger Focus Mode for Height Gap Measurement
- Laser Scan Mode for Z axis form analysis
| |
| Application |
- Semiconductor packages, Subss, Stampled parts, Connectors and small parts, Clock parts
|
| Z120X Model(with Maximum Magnification Module) |
120X optical magnification enables measurements of fine line widths High-precision TTL Lase AF
features high NA and enables measurements of small height gaps Perfect for measurement of high-
density, finely-machined workpieces Optional Bird's Eye View software plots MEMS parts in 3D format
Ideal for small high-density PCBs, Small precision dies and models, packages(2D+height), MEMS parts |
| LU Model(Universal epi-illuminator/motorized nosepiece) |
Full range of Nikon CFI60 LU microscope objectives from 5X to 150X Supports brightfield, darkfield,
DIC, simple polarizing applications Motorized quintuple universal nosepiece Easy to use software
controls all functions of the system Ideal for small-size LDCs, organic EL panels, 8"(200mm) wafers |
| VMR AutoMeasure Standard Provider software | 
| I NEXIV VMR-3020/Z120X/LU |
Stroke(XxYxZ)
|
Optical Head for Type 1,2,3 LU model |
300x200x150mm |
| LU model |
11.8x7.9x5.9in |
With max.magnification module
(high mag.lens) |
300x200x150mm
11.8x7.9x5.9in |
With max.magnification module
(low mag.lens) |
250x200x150mm
9.8x7.9x5.9in |
| Minimum readout |
0.1㎛ |
| Maximum workpiece weight |
20kg(44.0lb) |
| Measuring uncertainty |
1.5+4L/1000㎛
(workpiece max.5kg) |
2.5+4L/1000㎛
(workpiece max.5kg) |
| Z-axis(L:Length in mm<W.D) |
1.5+L/150㎛ Note:Z-axis accuracy is guaranteed by Laser |
| Camera |
B&W 1/3-in CCD(progressive scan),color 1/3-in CCD |
| Working distance |
Optical Head for Type 1,2,3 |
50mm |
| With max.magnification module |
High mag.objective lens:9.8mm Low mag.objective lens:32mm) |
| LU model |
Refer to C FI Objective Lenses for LCD |
| Magnification vs field view |
Optical Head for Type 1 |
0.5-7.5X/9.33x 7-0.622x0.467mm |
| Optical Head for Type 2 |
1-15X/4.67 x 3.5-0.311x0.233mm |
| Optical Head for Type 3 |
2-30X/2.33x1.75-0.155x0.117mm |
With max. magnification module
|
1-120X/4.67 x 3.5-0.039x0.029mm |
| Auto focus |
TTI Laser AF and Vision AF,LU model:Vision AF only |
| Illumination |
Optical Head for Type 1,2,3
|
Diascopic epscopic,8-segment LED ring illumination(inner ring/outer ring) |
| With max.magnification module |
Episcopic, diascopic(with high mag.head only),darkfield illumination |
| LU model |
Diascopic, Episcopacy&Darkfield illumination |
| Power source |
AC100-240V±10%,50/60Hz |
| Power consumption |
Max.11A(Standard type) 13A(Z120X type) |
| Dimensions&weight |
Main unit only |
625x728x1195mm
approx.200kg
(24.6x28.7x47.0in,441.0lb) |
| Main unit&table |
690x730x1725mm
approx.240kg
(27.2x28.7x67.9in,529.1lb) |
| Controller |
250x550x500mm,approx,31kg(9.8x21.7x19.7in,68.3lb) |
Footprint
|
2100(W)x1100(D)mm
(82.7x43.3in) |
|
