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CNC Vision System
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T-king GVS Series C.W Series Accura III Series i-NEXIV VMA2520 VMR1515
VMR3020 VMR6555 VMR10080 VMC&VMC-T  


i-NEXIV VMR1515(CNC Video Measuring System)


Feature
  • 대학, 기업연구소, 각급연구기관 등의 분석, 연구용
  • MEMS,나노프린터,반도체,LCD,금속 부품 등
  • Digital Imaging&Multi-sensing metrology 신개념 CNC Video 현미경


Small part Measurement Platform
  • X,Y,Z travel 150x150x150mm
    Type 1,2,3 Models
  • 3 models(Type:1,2,3)with 5 step zoom magnification to
    cover different fields of view(F.O.V)and resolution
    erquments
  • Long working distance 50mm, support 3D measurements
  • 15X zoom porvides wide field of view for rapid search and high magnification for accurate measurement
  • High-speed TTL Laser AF ensures high-precision AF
    independent of surface shape
  • Improved stage accuracy with new lower coefficient of
    expansion 0.1micron resolution scales
  • Ideal for Semiconductor packages, Substrates, Stamped
    parts, Connectors and small parts, Clock parts






TTL(Thru-The-Lens)Laser AF
  • High Speed&Accurate Focusing enabling precise-Z
    axis measurements
  • Co-Axial Laser Unit for easy operation
  • 50mm Working Distance for Dynamic Height
    Measurement
  • Trigger Focus Mode for Height Gap Measurement
  • Laser Scan Mode for Z axis form analysis



Application
  • Semiconductor packages, Subss, Stampled parts, Connectors and small parts, Clock parts



Z120X Model(with Maximum Magnification Module)
120X optical magnification enables measurements of fine line widths High-precision TTL Lase AF
features high NA and enables measurements of small height gaps Perfect for measurement of high-
density, finely-machined workpieces Optional Bird's Eye View software plots MEMS parts in 3D format
Ideal for small high-density PCBs, Small precision dies and models, packages(2D+height), MEMS parts


LU Model(Universal epi-illuminator/motorized nosepiece)
Full range of Nikon CFI60 LU microscope objectives from 5X to 150X Supports brightfield, darkfield,
DIC, simple polarizing applications Motorized quintuple universal nosepiece Easy to use software
controls all functions of the system Ideal for small-size LDCs, organic EL panels, wafers up to
150mm.


VMR AutoMeasure Standard Provider software



Dimensions




Specifications
I NEXIV VMR-1515/Z120X/LU
Stroke(XxYxZ)
Optical Head for Type 1,2,3 LU model 150x150x150mm
LU model 5.9x5.9x5.9 in
With max.magnification module
(high mag.lens)
150x150x150mm
5.9x5.9x5.9in
With max.magnification module
(low mag.lens)
100x150x150mm
3.9x5.9x5.9in
Minimum readout 0.1㎛
Maximum workpiece weight 20kg(44.0lb)
Measuring uncertainty 1.5+4L/1000㎛
(workpiece max.5kg)
2.5+4L/1000㎛
(workpiece max.5kg)
Z-axis(L:Length in mm<W.D) 1.5+L/150㎛ Note:Z-axis accuracy is guaranteed by Laser
Camera B&W 1/3-in CCD(progressive scan),color 1/3-in CCD
Working distance Optical Head for Type 1,2,3 50mm
With max.magnification module High mag.objective lens:9.8mm Low mag.objective lens:32mm)
LU model Refer to C FI Objective Lenses for LCD
Magnification vs field view Optical Head for Type 1 0.5-7.5X/9.33x 7-0.622x0.467mm
Optical Head for Type 2 1-15X/4.67 x 3.5-0.311x0.233mm
Optical Head for Type 3 2-30X/2.33x1.75-0.155x0.117mm
With max. magnification module
1-120X/4.67 x 3.5-0.039x0.029mm
Auto focus TTI Laser AF and Vision AF,LU model:Vision AF only
Illumination Optical Head for Type 1,2,3
Diascopic epscopic,8-segment LED ring illumination(inner ring/outer ring)
With max.magnification module Episcopic, diascopic(with high mag.head only),darkfield illumination
LU model Diascopic, Episcopacy&Darkfield illumination
Power source AC100-240V±10%,50/60Hz
Power consumption Max.11A(Standard type) 13A(Z120X type)
Dimensions&weight Main unit only 512x703x1200mm
approx.180kg
(20.2x27.7x47.2in,396.8lb)
Main unit&table 512x703x1200mm
approx.180kg
(20.2x27.7x47.2in,396.8lb)
Controller 250x550x500mm,approx,31kg(9.8x21.7x19.7in,68.3lb)
Footprint
2100(W)x1100(D)mm
(82.7x43.3in)



 

경기도 군포시 금정동 1-40 한림휴먼타워 1009호    상호. (주)베스텍비젼
TEL. 031-479-4964     FAX. 031-479-7464     eMail. master@bestecvision.co.kr
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